nitride passivation

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  • 氮化物钝化法,氧化硅钝化法
    1. The nitride on oxide layers remains intact.
      氧化物表层上面的氮化物保持原状不动。
    2. The surface layer obtained was composed of the bcc nitride of tantalum instead of orthorhombic oxide.
      膜层物相由钽的氧化物变为氮化物。