The fabrication process of a solenoid-type microinductor is also introduced. 并介绍了螺线管型微电感的制作工艺过程。
It is necessary to measure Young's modulus of micro-mained materials because of the special manufacture process by using silicon etching technique. 摘要利用蚀刻矽技术制造的微机械构件，由于特殊的制作工艺而需要对其材料的杨氏模量进行测量。
